Advanced Instrumentation and Control of active MEMS microcantilevers for high-throughput nanometrology

Research Environment

UTS is ranked 90th amongst all universities worldwide (2024 QS World University Rankings) and is the top university in Australia under 50 years of age, ranking ninth globally (Times Higher Education Young University Rankings 2023). In the 2018 Excellence in Research for Australia (ERA), 100% of UTS research in broad Fields of Research (FoR) was rated as world standard or above. A major contribution to the steady rise in international rankings has been the substantial investment made by UTS in research and research excellence.

Embedded within the Faculty of Engineering and Information Technology (FEIT), the main research goal of the Centre for Audio, Acoustics and Vibration (CAAV) is to focus on translational and applied research to become a world-leading centre in research, development and commercial applications of audio, acoustics and vibration theories and technologies. CAAV aims to:

• develop innovative technologies for sound and vibration measurements, monitoring, analyses and control based on advanced network and signal processing knowledge,
• translate academic research into direct economic and social impact through establishing collaboration and partnership with business, industry and community sectors,
• build international collaboration with top leading universities, government agencies and industries such as Technical University Munich, University of Giessen, Cambridge University, Imperial College London, Defence Science and Technology Group, Airbus, Boing and Google, Advanced Navigation, and Nearmap,
• provide world class education and training programs in the fields of audio, acoustics and vibration to train and provide best quality students to meet real world needs.

CAAV currently has 50 members, including 10 Postdoctoral Research Associates/ Fellows, and 20 PhD candidates. CAAV is a relatively young centre with a stellar trajectory – its total income over the last 7 years exceeds $12 million in mostly competitive Category 1 and Category 2 research funding. Excellence in research is the key pilar of CAAV making it thrive through fundamental blue-sky research and science, leading to grounded engineering breakthroughs.

Project Background

Microelectromechanical Systems (MEMS) have been identified as one of the most promising technologies of the 21st century. These precision micro mechatronic systems have the potential to revolutionize both industrial and consumer products by combining silicon-based microelectronics with micromachining technology. MEMS devices are fabricated using integrated circuit (IC) batch processing techniques and can range in size from a few micrometres to millimetres. The interdisciplinary nature of MEMS utilizes design, engineering, and manufacturing expertise from a wide range of technical areas including integrated circuit fabrication technology, mechanical engineering, materials science, advanced manufacturing, electrical engineering, control engineering, optics, and instrumentation.

Under a recently funded ARC Discovery Early Career Researcher Award (DECRA), two PhD research topics are available to develop novel, scalable nanomechanical sensor platforms in combination with high-performance electronics and control systems for high-throughput imaging at the nanoscale level. The microsensors are based on MEMS devices with integrated actuation and sensing capabilities and will be interfaced with an atomic force microscope (AFM), one of the most powerful tools for imaging various surfaces with a resolution down to the length scale of a single atom. A major challenge in this field is to develop new technology to meet the needs of next-generation advanced manufacturing such as of nanomaterials and semiconductors. The available PhD projects are strongly connected to two cutting-edge applications in academia and industry:

1. High-throughput quality inspection of semiconductor devices and
2. Visualisation of the chemical structure and precise orientation of adsorbed molecules under ultra-high vacuum and low temperatures conditions.

Both PhD topics have the potential for research visits at overseas industrial partners and collaborating academic institutions.

Project 2 Description: Advanced Instrumentation and Control of active MEMS microcantilevers for high-throughput nanometrology

This project will focus on designing novel electronic instrumentation interfaces with extremely low noise performance and minimal electrical cross-coupling between the MEMS actuators and sensors, particular for applications at cryogenic temperatures. A focus is placed on pushing the performance limits of discrete printed circuit board (PCB) / MEMS integration and fully integrated solutions. This project will also include research into new control systems for microcantilever arrays, implemented on Field Programmable Gate Arrays (FPGAs), to enable real-time measurement of the tip-sample interaction force. The successful PhD candidate is expected to develop an expert knowledge in electronic MEMS integration, low-noise analog electronics, high-speed controller implementations, and nanometrology with extensive laboratory and microscopy experience.

The project is best suited for students with a strong background in analog electronics, embedded systems, feedback control systems, and FPGA implementations with an excellent understanding of system dynamics and a strong interest in precision mechatronic systems and emerging challenges in micro- and nanotechnology.

Application Requirements

• University Degree (Bachelor, 1st class honours or Masters) in Mechatronics, Control, Mechanical, or Electrical and Electronics Engineering or related disciplines with a strong academic record.
• Demonstrated experience in undertaking research in the fields of microfabrication technologies, mechatronic engineering, materials science, advanced manufacturing, electrical/electronic engineering, control engineering, optics, and instrumentation is preferred.

How to Apply

To apply, please submit the following documents via email to PhD.CAAV[at]uts.edu.au.

1. Current CV showing relevant work experience and education with academic transcripts.
2. Statement demonstrating your experience in undertaking research projects in the fields of micro/nano systems, mechatronics, materials science, advanced manufacturing, electronics, control systems, optics, and/or instrumentation (max. 1 page).
3. Research proposal for your preferred research topic as outlined in the advertisement (min. 2 pages).