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Time resolved IR and photoemission studies of EUV-Matter interactions


About This PhD Project

Project Description

Surface and interface analysis within the semiconductor industry has reached a level of refinement beyond that imaginable 25 years ago. Likewise, device architectures and dimensions are now at a level not thought possible even 10 years ago. With this, the question often asked is: How far can this go on for. In an effort to gain a better understanding of the path forward, imec has invested in the construction of a new facility termed the “Attolab”.

This facility, co-developed by the Advanced Patterning (AP) and the Materials and Component Analysis (MCA) teams within imec, will comprise of two pulsed coherent photon sources, one set at 92 eV and the other with a pre-selectable energy between 26-124 eV. In addition, there will be an IR end station and a photo-emission end station containing an Al-ka source at 1486.6 eV, amongst other things. This will allow many novel experiments inclusive of time resolved Infra-Red (IR) spectroscopy, Ultraviolet Photoelectron Spectroscopy (UPS), Angle Resolved Photo Emission Spectroscopy (ARPES), X-ray Photoelectron Spectroscopy (XPS), and their time resolved variants inclusive of Two Photon Photoelectron Emission (2PPE).

Through this PhD, the successful applicant will actively work on this facility, as well as the XPS within the MCA labs if needed. The primary aim will be to use the IR and photoemission spectroscopies to gain a better insight into the chemistry and kinetics taking place in Photo-resist materials under EUV exposure. Other exotic materials such as Transition Metal Dichalcogenides, Topological Insulators, etc. will also be examined using this facility. To aid in Photo-resist spectral identification and to understand the time dependent mechanisms that take place, a parallel PhD activity employing atomistic simulations will be active to allow a comparison of the measured spectra with quantum chemical calculations. The successful applicant will learn all the necessary skills at imec.

Background

To be eligible, applicants must have a master degree in either physics or chemistry, with a strong background in material science and solid-state physics. As the PhD will include a large amount of experimental work on complex systems, previous photoemission and/or laser experience would be a plus. A basic knowledge of atomistic simulations would also be a plus.

Type of work

70% experimental / 30% theory

Related Subjects

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